3M™ Liqui-Cel™ Membrane Contactors for Semiconductor and Microelectronics

As semiconductor processing, flat panel display manufacturing and other high-technology industries move to smaller line widths, larger wafer sizes and advancing display technology dissolved gas control is a critical consideration in ultra-pure water quality.

Because of their efficiency, simplicity and high gas removal performance, 3M™ Liqui-Cel™ Membrane Contactors are considering the benchmark in the degassing technology in the semiconductor and flat panel display process water treatment systems. They have low extractables and do not negatively impact water quality. With proper system design, these membrane degassers remove O₂ from water down to less than 1 ppb and dissolved CO₂ to 0.5 ppm. Low dissolved oxygen levels protect product yields, while low CO₂ levels may help maximize the efficiency of electrodionization (EDI) and other ion exchange processes.

Unlike conventional vacuum towers these membrane degasser systems can be expanded. As water volume requirements grow or dissolved gas specifications get lower additional contactors can be added to a system to meet the changing needs.

Liqui-Cel membrane contactors also enable low concentrations and precision control of the dissolved gases in ultra-pure water and other compatible wet bench processes fluids.